Effect of contamination solutions and substrate conditions on copper particle growth behavior

Materials Research Society Symposium - Proceedings

Volumn 477, Issue , 1997, Pages 275-280

  Choi, Geun Min ^a   Sekine, Katsuyuki ^a   Morita, Hiroshi ^a   Ohmi, Tadahiro ^a  

^a Hynix Semiconductor Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CONTAMINATION; GROWTH (MATERIALS); OXIDES; PARTICLES (PARTICULATE MATTER); SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SINGLE CRYSTALS; SUBSTRATES; WATER;

NATIVE OXIDES;

COPPER;

EID: 0030679371     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)