Resolution limit of optical disc mastering

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 1 B, 1997, Pages 539-548

  Put, Paul L M ^a   Urbach, H Paul ^a   Morton, Robert D ^a   Rusch, Jurgen J ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Data storage; Diffraction; Laser beam cutting; Optical disc mastering; Optical recording; Phase shifter; Photolithography; Photoresist; Write strategy

Indexed keywords

OPTICAL DISK MASTERING; SOFTWARE PACKAGE MASTER;

COMPUTER SIMULATION; COMPUTER SOFTWARE; LASER APPLICATIONS; OPTICAL RECORDING; PHOTOLITHOGRAPHY; PHOTORESISTORS;

OPTICAL DISK STORAGE;

EID: 0030679194     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.36.539     Document Type: Article

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