Novel technique for 3-D integration: Ge-seeded laterally crystallized TFTs

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1997, Pages 97-98

  Subramanian, Vivek ^a   Saraswat, Krishna C ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CMOS INTEGRATED CIRCUITS; CRYSTALLIZATION; GRAIN GROWTH; MOS DEVICES; SEMICONDUCTING FILMS; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON;

POLYGERMANIUM; SEEDING AGENTS;

THIN FILM TRANSISTORS;

EID: 0030678783     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)