Micro-actuators employing acoustic streaming caused by high-frequency ultrasonic waves

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 805-808

  Hashimoto, K ^a   Ikekame, K ^a   Yamaguchi, M ^a  

^a CHIBA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC STREAMING; ACTUATORS; ARRAYS; FLOW OF FLUIDS; LIQUIDS; ULTRASONIC WAVES;

MICROACTUATOR; MICROMANIPULATOR; MICROPUMP;

ULTRASONIC TRANSDUCERS;

EID: 0030678728     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)