TEM observation of grown-in defects in CZ-Si crystals and their secco etching properties

Materials Research Society Symposium - Proceedings

Volumn 442, Issue , 1997, Pages 119-124

  Kato, Masahiro ^a   Takeno, Hiroshi ^a   Kitagawara, Yutaka ^a  

^a SHIN ETSU CHEMICAL CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; CRYSTAL DEFECTS; CRYSTAL GROWTH FROM MELT; CRYSTAL STRUCTURE; ETCHING; HEAT TREATMENT; MORPHOLOGY; OXIDATION; OXIDES; TRANSMISSION ELECTRON MICROSCOPY;

CHEMICAL PROPERTIES; FLOW PATTERN DEFECTS; HIGH TEMPERATURE OXIDATION; LASER SCATTERING TOMOGRAPHY; SECCO ETCH PIT DEFECTS;

SEMICONDUCTING SILICON;

EID: 0030678348     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)