Effects of Thermal Treatment on the Structure and Properties of SiO2-TiO2 Gel Films on Silicon Substrates

Journal of Sol-Gel Science and Technology

Volumn 8, Issue 1-3, 1997, Pages 377-380

  Du, Xin Min ^a   Almeida, Rui M ^a  

^a INESC   (Portugal)

Author keywords

FTIR; Sintering; Sol gel thin film

Indexed keywords

CHEMICAL BONDS; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HIGH TEMPERATURE EFFECTS; MOLECULAR STRUCTURE; REFRACTIVE INDEX; RESIDUAL STRESSES; SILICA GEL; SILICON; SINTERING; THIN FILMS; TITANIUM DIOXIDE;

PLANAR WAVEGUIDES;

SOL-GELS;

EID: 0030678285     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1007/bf02436868     Document Type: Article

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