Optical sensors based on porous silicon multilayers: a prototype

Materials Research Society Symposium - Proceedings

Volumn 452, Issue , 1997, Pages 637-642

  Theiss, W ^a   Arens Fischer, R ^a   Hilbrich, S ^a   Scheyen, D ^a   Berger, M G ^a   Krueger, M ^a   Thoenissen, M ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; DECOMPOSITION; ETCHING; MULTILAYERS; OPTICAL FILTERS; OPTICAL SENSORS; OXIDATION; REFRACTIVE INDEX; SPECTROMETERS;

POROUS SILICON MULTILAYERS; POROUS SILICON OPTICAL FILTERS;

POROUS SILICON;

EID: 0030674882     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)