Atomic force microscopic investigation of PZT thin films by MOD technology

Ferroelectrics

Volumn 196, Issue 1-4, 1997, Pages 17-22

  Lu, W ^a   Zhu, W ^a   Yao, X ^a,b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CRYSTAL MICROSTRUCTURE; DEPOSITION; FILM GROWTH; GRAIN BOUNDARIES; MATHEMATICAL MODELS; MICROCRACKS; MORPHOLOGY; PEROVSKITE; PHASE TRANSITIONS; THERMAL EFFECTS;

LEAD ZIRCONATE TITANATES (PZT); METALLORGANIC DEPOSITION (MOD); PYROCHLORE MATRICES; ROSETTE GROWTH MODELS;

THIN FILMS;

EID: 0030674835     PISSN: 00150193     EISSN: None     Source Type: Journal    
DOI: 10.1080/00150199708224123     Document Type: Article

References (12)

1. J. F. Scott and C. A. Paz de Araujo, Science, 246, 1400 (1989).
2. J. T. Evens and R. Womack, IEEE J. Solid-State Circuits, 21, 1171 (1988).
3. R. Moazzami and C. Hu, IEEE Trans, Electronic Devices, 29, 2044 (1992).
4. R. W. Vest and W. Zhu, Ferroelectics, 119, 61 (1991).
5. R. Cuppens, P. K. Larsen, and G. A. C. M. Spierings, Microelectronic Engineering, 19, 245 (1992).
6. A. H. Carim, B. A. Tuttle, D. H. Doughty, and S. L. Martinez, J. Am. Ceram. Soc., 74, 1455 (1991).
7. B. A. Tuttle, T. J. Headley, B. C. Bunker, R. W. Schwartz, T. J. Zender, C. L. Hemandez, D. C. Goodnow, R. J. Tissot, J. Michael, and A. H. Carim, J. Mater. Res., 7, 1876 (1992).
8. S. A. Myers and L. N. Chapin, Ferroelectric Thin Films, Edited by E. R. Myers and A. I. Kingon, (Mater. Res. Soc. Symp. Proc. 200, Pittsburgh, PA, 1990), p.219.
9. C. K. Kwok and S. B. Desu, J. Mater. Res., 2, 1728 (1994).
10. L. A. Bursill and K. G. Brooks, J. Appl. Phys., 75, 4501 (1994).
11. I. O. Owate and R. Freer, J. Appl. Phys., 72, 2418 (1992).
12. M. Klee, R. Eusemann, R. Waser, W. Brand, and H. van Hal, J. Appl. Phys., 72, 1566 (1992).