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Volumn 246, Issue , 1997, Pages 61-90

Hard nitride coatings by DC magnetron sputtering

Author keywords

Coating; Hard Coating; Nitride Coating; Thin Films

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COATINGS; EROSION; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; NITRIDES; SURFACE TREATMENT; THIN FILMS; WEAR RESISTANCE;

EID: 0030674721     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.246.61     Document Type: Article
Times cited : (10)

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  • 10
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    • Reactive Sputtering
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  • 12
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    • Maissel, L.I.1
  • 20
    • 3943074284 scopus 로고
    • Ph.D Thesis, Deptt. of Materials Science and Metallurgical Engineering, Indian Institute of Technology, Bombay, India
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.