Laterally crystallized polysilicon TFTs using patterned light absorption masks

Annual Device Research Conference Digest

Volumn , Issue , 1997, Pages 54-55

  Subramanian, Vivek ^a   Saraswat, Krishna C ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ANNEALING; CRYSTALLIZATION; GRAIN GROWTH; LIGHT ABSORPTION; LOW TEMPERATURE OPERATIONS; MASKS; NUCLEATION; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

LOW TEMPERATURE SOLID PHASE CRYSTALLIZATION (LTSPC); POLYSILICON;

THIN FILM TRANSISTORS;

EID: 0030674634     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)