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Volumn 448, Issue , 1997, Pages 63-68
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In situ infrared observation of hydrogenation, oxidation, and adsorption on silicon surfaces in solutions
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ADSORPTION;
HYDROFLUORIC ACID;
HYDROGEN PEROXIDE;
HYDROGENATION;
INTERFACES (MATERIALS);
OXIDATION;
REACTION KINETICS;
SOLUTIONS;
SURFACE ACTIVE AGENTS;
SURFACE STRUCTURE;
SURFACE TREATMENT;
WATER;
FOURIER TRANSFORM INFRARED ATTENUATED TOTAL REFLECTION METHOD;
WET CHEMICAL TREATMENTS;
SEMICONDUCTING SILICON;
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EID: 0030673762
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (3)
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References (15)
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