Tilt angle effect on optimizing HALO PMOS performance

International Conference on Simulation of Semiconductor Processes and Devices, SISPAD

Volumn , Issue , 1997, Pages 33-36

  Su, Jiong Guang ^a   Wong, Shyh Chyi ^a   Huang, Chi Tsung ^a   Cheng, Chang Ching ^a   Wang, Chih Chiang ^a   Huang Lu, Shiang ^a   Tsui, Bing Yui ^a  

^a FENG CHIA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ION IMPLANTATION; LEAKAGE CURRENTS; MONTE CARLO METHODS; OPTIMIZATION; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DOPING;

SOURCE RESISTANCE; TILT ANGLE EFFECT;

MOS DEVICES;

EID: 0030673562     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)