|
Volumn 6, Issue , 1997, Pages 3531-3536
|
Integrated modeling methodology validation using the micro-precision interferometer testbed: Assessment of closed-loop performance prediction capability
|
Author keywords
[No Author keywords available]
|
Indexed keywords
CLOSED LOOP CONTROL SYSTEMS;
COMPUTER AIDED DESIGN;
COMPUTER SOFTWARE;
MACHINE DESIGN;
MICROPRECISION INTERFEROMETERS (MPI);
SOFTWARE PACKAGE INTEGRATED MODELING OF OPTICAL SYSTEMS (IMOS);
INTERFEROMETERS;
|
EID: 0030661069
PISSN: 07431619
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (11)
|
References (13)
|