Three-dimensional silicon micromechanical parts manufactured by electro-discharge machining

International Conference on Advanced Robotics, Proceedings, ICAR

Volumn , Issue , 1997, Pages 247-252

  Heeren, Paul Henri's ^a   Reynaerts, Dominiek ^a   Van Brussel, Hendrik ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; ROBOTIC ASSEMBLY; SILICON;

ELECTRODISCHARGE MACHINING; SURFACE MICROMECHANICS; THREE DIMENSIONAL SILICON MICROMECHANICAL PARTS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030660926     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (25)