In situ measurement of etch rate of single crystal silicon

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 707-710

  Steinsland, Elin ^a   Finstad, Terje ^a   Ferber, Alain ^a   Hanneborg, Anders ^a  

^a UNIVERSITY OF OSLO   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; INTERFEROMETRY; SEMICONDUCTOR DOPING; SINGLE CRYSTALS; SPECTROSCOPIC ANALYSIS; SURFACE ROUGHNESS;

IN SITU MONITORING; LASER REFLECTANCE INTERFEROMETRY;

SILICON WAFERS;

EID: 0030659211     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)