Effect of non-hydrostatic stress on kinetics and interfacial roughness during solid phase epitaxial growth in Si

Materials Research Society Symposium - Proceedings

Volumn 441, Issue , 1997, Pages 75-80

  Barvosa Carter, William ^a   Aziz, Michael J ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT REFLECTION; OPTICAL VARIABLES MEASUREMENT; PHASE INTERFACES; SEMICONDUCTING SILICON; STRESS ANALYSIS; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY;

NONHYDROSTATIC STRESS; REFLECTIVITY MEASUREMENT; SOLID PHASE EPITAXY;

EPITAXIAL GROWTH;

EID: 0030658312     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)