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Volumn , Issue , 1997, Pages 1-3
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300 mm technology - current status and future prospect
a
a
Trust Tech Inc
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
COST EFFECTIVENESS;
CRYSTAL GROWTH;
HEAT TREATMENT;
SILICON WAFERS;
STANDARDIZATION;
DYNAMIC RANDOM ACCESS MEMORY (DRAM);
VLSI CIRCUITS;
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EID: 0030655375
PISSN: 07431562
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/vlsit.1997.623667 Document Type: Conference Paper |
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Times cited : (6)
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References (3)
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