Coupled fluid-thermo-structures simulation methodology for MEMS applications

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1043-1046

  Athavale, M M ^a   Yang, H Q ^a   Przekwas, A J ^a  

^a CFD RESEARCH CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; CALCULATIONS; COMPUTATIONAL FLUID DYNAMICS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; FINITE VOLUME METHOD; NAVIER STOKES EQUATIONS;

COUPLED FLUID THERMO STRUCTURES SIMULATION; MICROFLUIDIC DEVICES; VIRTUAL COMPUTATIONAL ENVIRONMENT;

MICROELECTROMECHANICAL DEVICES;

EID: 0030655328     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)