Fabrication of 100 nm pMOSFETs with hybrid AFM/STM lithography

Digest of Technical Papers - Symposium on VLSI Technology

Volumn , Issue , 1997, Pages 129-130

  Soh, Hyongsok T ^a   Wilder, Kathryn ^a   Atalar, Abdullah ^a   Quate, Calvin F ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; MOSFET DEVICES; PHOTOLITHOGRAPHY; SCANNING TUNNELING MICROSCOPY;

SCANNING PROBE LITHOGRAPHY (SPL);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030655214     PISSN: 07431562     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)