Optical emission spectroscopy of sputtered Al atoms from Al and Al2O3 surfaces interacted with Arq+ (q = 1-9)

Physica Scripta T

Volumn 73, Issue , 1997, Pages 329-331

  Motohashi, Kenji ^a   Tsurubuchi, Seiji ^a   Shimizu, Hiroshi ^b   Mochiji, Kozo ^c   Tanuma, Hajime ^d   Kobayashi, Nobuo ^d  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

^b UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

^c HITACHI LTD   (Japan)

^d TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM; ARGON; ELECTRON TRANSITIONS; EMISSION SPECTROSCOPY; SPUTTERING;

OPTICAL EMISSION SPECTROSCOPY; THOMPSON SIGMUND VELOCITY DISTRIBUTION;

ION BOMBARDMENT;

EID: 0030655194     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1088/0031-8949/1997/t73/109     Document Type: Article

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