Novel multi-channel poly-Si TFT improving hydrogen passivation

Materials Research Society Symposium - Proceedings

Volumn 471, Issue , 1997, Pages 167-171

  Park, C M ^a   Jeon, J H ^a   Yoo, J S ^a   Han, M K ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION IN SOLIDS; DISPLAY DEVICES; ELECTRIC FIELDS; HYDROGEN; HYDROGENATION; PASSIVATION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

MULTI CHANNEL THIN FILM TRANSISTORS;

THIN FILM TRANSISTORS;

EID: 0030655055     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)