Ion beam injected point defects in crystalline silicon: Migration, interaction and trapping phenomena

Materials Research Society Symposium - Proceedings

Volumn 439, Issue , 1997, Pages 71-82

  Priolo, F ^a   Privitera, V ^a   Coffa, S ^a   Libertino, S ^a  

^a UNIVERSITY OF CATANIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL IMPURITIES; CRYSTALLINE MATERIALS; ION IMPLANTATION; SEMICONDUCTOR DOPING; THERMAL DIFFUSION IN SOLIDS;

TRAP LIMITED MIGRATION;

SEMICONDUCTING SILICON;

EID: 0030654702     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)