High-numerical-aperture optical designs

IBM Journal of Research and Development

Volumn 41, Issue 1-2, 1997, Pages 39-47

  Singh, R N ^{a,b,c,d,e,f,g}   Rosenbluth, A E ^h   Chiu, G L T ^h   Wilczynski, J S ^h  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b UNIVERSITY OF LUCKNOW   (India)

^c INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

^d IMPERIAL COLLEGE LONDON   (United Kingdom)

^e UNIVERSITY OF READING   (United Kingdom)

^f Polytechnic University   (United States)

^g PERKINELMER INC   (United States)

^h Microlithography Div Perkin Elmer ^*

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL DESIGN; PHOTOLITHOGRAPHY; PROJECTION SYSTEMS;

HIGH NUMERICAL APERTURE LENSES;

LENSES;

EID: 0030654568     PISSN: 00188646     EISSN: None     Source Type: Journal    
DOI: 10.1147/rd.411.0039     Document Type: Article

References (17)

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