Thin-film morphology and rutherford backscattering spectrometry

Materials Science Forum

Volumn 248-249, Issue , 1997, Pages 409-412

  Hahn, Th ^a   Metzner, H ^a   Gossla, M ^b   Conrad, J ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

^b HAHN MEITNER INSTITUT   (Germany)

Author keywords

Rutherford Backscattering; Scanning Tunneling Microscopy; Surface Morphology

Indexed keywords

MORPHOLOGY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING TUNNELING MICROSCOPY; SURFACE ROUGHNESS;

THIN FILM MORPHOLOGY;

THIN FILMS;

EID: 0030654259     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.248-249.409     Document Type: Article

References (6)

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2. H. Metzner, Th. Hahn, J.-H. Bremer and J. Conrad, submitted to Nucl. Instr. Meth. B.
3. M. Gossla, Th. Hahn, H. Metzner, J. Conrad and U. Geyer, Thin Solid Films 268, 39 (1995).
4. H. Metzner, Th. Hahn, J.-H. Bremer and J. Conrad, Appl. Phys. Lett., in press.
5. L. R. Doolittle, Nucl. Instr. Meth. B 9, 344 (1985).
6. L. R. Doolittle, Nucl. Instr. Meth. B 15, 227 (1986).