Structural analysis of nanocrystals embedded in amorphous Si films

Materials Research Society Symposium - Proceedings

Volumn 452, Issue , 1997, Pages 785-790

  Garrido, B ^a   Achio, A ^a   Macia, J ^a   Morante, J R ^a   Perez Rodriguez, A ^a   Ruterana, P ^a   Rizk, R ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; ANNEALING; CRYSTAL STRUCTURE; ENERGY GAP; HYDROGEN; PARTICLE SIZE ANALYSIS; PLASMAS; RAMAN SCATTERING; SPUTTERING; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

HYDROGEN PLASMA; NANOCRYSTALS; RF SPUTTERING;

NANOSTRUCTURED MATERIALS;

EID: 0030653505     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)