MBE regrowth of InP on patterned surfaces and its application potential for optoelectronic devices

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 1997, Pages 66-69

  Paraskevopoulos, A ^a   Kuenzel, H ^a   Boettcher, J ^a   Urmann, G ^a   Hensel, H J ^a   Bozbek, Al ^a  

^a FRAUNHOFER HEINRICH HERTZ INSTITUTE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; DRY ETCHING; INTEGRATED OPTOELECTRONICS; MOLECULAR BEAM EPITAXY; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR GROWTH; THERMAL DIFFUSION IN SOLIDS;

SOLID SOURCE MOLECULAR BEAM EPITAXY (SSMBE);

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0030653411     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)