Reliability of measurements of ion fluxes from electron beam ion sources

Physica Scripta T

Volumn 71, Issue , 1997, Pages 164-174

  Stockli, Martin P ^a   Winecki, S ^a  

^a KANSAS STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENT MEASUREMENT; ELECTRON BEAMS; MEASUREMENT ERRORS;

ELECTRON BEAM ION SOURCES (EBIS); ION FLUX MEASUREMENTS;

ION SOURCES;

EID: 0030653225     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1088/0031-8949/1997/t71/032     Document Type: Article

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