Low-temperature deposition and characterization of AlxIn1-xN thin films

Materials Research Society Symposium - Proceedings

Volumn 449, Issue , 1997, Pages 301-306

  Qiu, G ^a   Olowolafe, J O ^a   Peng, T ^a   Unruh, K M ^a   Swann, C P ^a   Piprek, J ^a  

^a UNIVERSITY OF DELAWARE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; NITRIDES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING FILMS; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR GROWTH; X RAY DIFFRACTION ANALYSIS;

REACTIVE MAGNETRON SPUTTERING; SEMICONDUCTING NITRIDES;

MAGNETRON SPUTTERING;

EID: 0030651743     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)