Patterning of LiGaO2 and LiAlO2 by wet and dry etching

Materials Research Society Symposium - Proceedings

Volumn 449, Issue , 1997, Pages 1041-1046

  Lee, J W ^a   Pearton, S J ^a   Abernathy, C R ^a   Chai, B L ^a   Wilson, R G ^a   Ren, F ^a   Zavada, J M ^a  

^a UNIVERSITY OF FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; DRY ETCHING; EPITAXIAL GROWTH; GALLIUM COMPOUNDS; LITHIUM COMPOUNDS; SEMICONDUCTING GALLIUM COMPOUNDS; SOLUTIONS;

ACID SOLUTIONS; LITHIUM ALUMINUM OXIDE; LITHIUM GALLIUM OXIDE; WET ETCHING;

ETCHING;

EID: 0030651737     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)