Novel two axis actuator for high speed large angular rotation

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 327-330

  Dhuler, Vijay R ^a   Walters, Mark ^a   Mahadevan, Ramaswamy ^a   Cowen, Allen B ^a   Markus, Karen W ^a  

^a MCNC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; MICROMACHINING; SEMICONDUCTING SILICON; SINGLE CRYSTALS;

TWO AXIS ROTARY ACTUATORS;

ACTUATORS;

EID: 0030650759     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)