Determination of defect size distributions based on electrical measurements at a novel harp test structure

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 1997, Pages 1-6

  Hess, Christopher ^a   Weiland, Larg H ^a  

^a UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; ELECTRIC FAULT CURRENTS; ELECTRIC VARIABLES MEASUREMENT; INTEGRATED CIRCUIT MANUFACTURE; PROBABILITY;

NOVEL HARP TEST STRUCTURE;

INTEGRATED CIRCUIT TESTING;

EID: 0030649703     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)