Methodology for predictive calibration of TCAD simulators

International Conference on Simulation of Semiconductor Processes and Devices, SISPAD

Volumn , Issue , 1997, Pages 177-180

  Le Carval, Gilles ^a   Scheiblin, Pascal ^a   Poncet, Dominique ^a   Rivallin, Pierrette ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; MATHEMATICAL MODELS; MEASUREMENTS; OPTIMIZATION; STATISTICAL METHODS;

TAGUCHI METHOD; TECHNOLOGY COMPUTER AIDED DESIGN SIMULATORS;

COMPUTER SIMULATION;

EID: 0030649203     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)