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Volumn 43, Issue , 1997, Pages 189-198
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Piezoelectric microelectromechanical sensor array capable of generating three-dimensional tactile images
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRODES;
FLUORINE CONTAINING POLYMERS;
HYSTERESIS;
MICROELECTROMECHANICAL DEVICES;
MONOLITHIC INTEGRATED CIRCUITS;
PIEZOELECTRIC MATERIALS;
PLASTIC FILMS;
MICROSENSOR;
PIEZOELECTRIC MICROELECTROMECHANICAL SENSOR ARRAY;
PIEZOELECTRIC POLYMER;
POLYVINYLIDENE FLUORIDE;
TACTILE SENSORS;
SENSORS;
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EID: 0030649186
PISSN: 02277576
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (3)
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References (14)
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