Impact of temperature and concentration on SC2 cost and performance in a production environment

Materials Research Society Symposium - Proceedings

Volumn 477, Issue , 1997, Pages 519-526

  Riley, D J ^a   Glick, J S ^a   Parks, V ^a   Matamis, G ^a  

^a ADVANCED MICRO DEVICES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DECOMPOSITION; MASS SPECTROMETRY; PARTICLES (PARTICULATE MATTER); PEROXIDES; PLASMA APPLICATIONS; SEMICONDUCTING SILICON; SOLUTIONS; THERMAL EFFECTS;

INDUCTIVELY COUPLES PLASMA MASS SPECTROMETRY (ICPMS); THERMAL OXIDE WAFERS;

SURFACE CLEANING;

EID: 0030648942     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)