Response surface characterization of the deposition of LPCVD SiGe for solid-phase crystallized poly-TFTS

International Workshop on Statistical Metrology, Proceedings, IWSM

Volumn , Issue , 1997, Pages 94-97

  Subramanian, Vivek ^a   Saraswat, Krishna C ^a   Hovagimian, Howard ^a   Mehlhaff, John ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; FABRICATION; LIQUID CRYSTAL DISPLAYS; OPTIMIZATION; SUBSTRATES;

RESPONSE SURFACE CHARACTERIZATION; SOLID PHASE CRYSTALLIZATION;

THIN FILM TRANSISTORS;

EID: 0030648888     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)