State-of-the-art evaluation of ultra-clean ULSI process

Materials Research Society Symposium - Proceedings

Volumn 477, Issue , 1997, Pages 403-407

  Fischer Colbrie, A ^a   Laderman, S S ^a   Brennan, S ^a   Ghosh, S ^a   Takaura, N ^a   Pianetta, P ^a   Shimazaki, A ^a   Waldhauer, A ^a   Wherry, D ^a   Barkan, S ^a  

^a HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORESCENCE; IMPURITIES; INTEGRATED CIRCUIT MANUFACTURE; SYNCHROTRON RADIATION; X RAY ANALYSIS;

SYNCHROTRON RADIATION TOTAL REFLECTION X RAY FLUORESCENCE (SR TXRF);

SILICON WAFERS;

EID: 0030648276     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)