SMART-CUT: The basic fabrication process for UNIBOND SOI wafers

Materials Research Society Symposium - Proceedings

Volumn 446, Issue , 1997, Pages 177-186

  Auberton Herve, A J ^a   Barge, T ^a   Metral, F ^a   Bruel, M ^a   Aspar, B ^a   Maleville, C ^a   Moriceau, H ^a   Poumeyrol, T ^a  

^a PARC TECHNOLOGIQUE DES FONTAINES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; HYDROGEN; ION IMPLANTATION; SILICON ON INSULATOR TECHNOLOGY; SURFACE ROUGHNESS; THIN FILMS;

SMART CUT PROCESS;

SILICON WAFERS;

EID: 0030648134     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)