Simulation of integrated electromagnetic device systems

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1051-1054

  Romanowicz, B ^a   Lerch, Ph ^a   Renaud, Ph ^a   Fullin, E ^a   de Coulon, Y ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; TRANSDUCERS;

ELECTROMAGNETIC DEVICES; INDUCTIVE DISPLACEMENT SENSOR; MICRO RELAY;

SENSORS;

EID: 0030647235     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)