Capacitive differential pressure sensor with high overload capability using silicon/glass technology

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1477-1480

  Hein, S ^a   Holzner, K ^a   Schlichting, V ^a   Obermeier, E ^a   Barton, K ^a  

^a ROBERT BOSCH GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; COMPUTER SIMULATION; FINITE ELEMENT METHOD; HYDROSTATIC PRESSURE; LIQUIDS; OPTIMIZATION; SANDWICH STRUCTURES;

ANODIC BONDING; CAPACITIVE PRESSURE SENSOR; DIFFERENTIAL PRESSURE; SILICON GLASS TECHNOLOGY;

SENSORS;

EID: 0030647221     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)