Fast algorithms for computing electrostatic geometric sensitivities

International Conference on Simulation of Semiconductor Processes and Devices, SISPAD

Volumn , Issue , 1997, Pages 121-123

  Wang, J ^a   White, J ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; FAST FOURIER TRANSFORMS; PERTURBATION TECHNIQUES; PIECEWISE LINEAR TECHNIQUES; SENSITIVITY ANALYSIS;

ELECTROSTATIC FORCES; LINEARLY VARYING DIPOLE DISTRIBUTION;

ALGORITHMS;

EID: 0030647090     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)