CMOS integrated infrared sensor

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1259-1262

  Chang, David T ^a   Chen, David M ^a   Lin, Felice H ^a   Kaiser, William J ^a   Stafsudd, Oscar M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; INFRARED RADIATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SOL-GELS; THERMAL CONDUCTIVITY OF SOLIDS; THIN FILMS;

MICROSENSORS; PYROELECTRIC MATERIALS; RESPONSITIVITY;

INFRARED DETECTORS;

EID: 0030647057     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)