![]() |
Volumn 170, Issue 1-4, 1997, Pages 149-154
|
Evaluation of cracking efficiency of As and P precursors
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ARSENIC COMPOUNDS;
DECOMPOSITION;
EPITAXIAL GROWTH;
HYDRIDES;
MASS SPECTROMETRY;
PHOSPHORUS COMPOUNDS;
PYROLYSIS;
MOVPE PRECURSORS;
METALLORGANIC VAPOR PHASE EPITAXY;
|
EID: 0030646556
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(96)00634-3 Document Type: Article |
Times cited : (18)
|
References (20)
|