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Volumn , Issue , 1997, Pages 15-18
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Single mask stress buffer
a a a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
AROMATIC HYDROCARBONS;
DIELECTRIC MATERIALS;
ELECTRONICS PACKAGING;
ETCHING;
MASKS;
PASSIVATION;
RELIABILITY;
SILICON NITRIDE;
STRESSES;
THERMAL EXPANSION;
BOND YARDS;
FUSE LINKS;
MASK STRESS BUFFER;
PHOTOSENSITIVE BENZOCYCLOBUTENES;
POLYMER COATING;
POLYMER DIELECTRIC;
PLASTIC FILMS;
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EID: 0030646104
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
Times cited : (6)
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References (13)
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