Low pressure CVD of GaN from GaCl3 and NH3

Materials Research Society Symposium - Proceedings

Volumn 449, Issue , 1997, Pages 307-312

  Topf, M ^a   Koynov, S ^a   Fischer, S ^a   Dirnstorfer, I ^a   Kriegseis, W ^a   Burkhardt, W ^a   Meyer, B K ^a  

^a JUSTUS LIEBIG UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; NITRIDES; PHOTOLUMINESCENCE; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTING GALLIUM COMPOUNDS;

GALLIUM NITRIDE; HETEROEPITAXIAL GROWTH;

CHEMICAL VAPOR DEPOSITION;

EID: 0030645937     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)