Warpage of InP wafers

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 1997, Pages 272-275

  Fukui, T ^a   Kurita, H ^a   Makino, N ^a  

^a JAPAN ENERGY CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; INTERFEROMETERS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MOLECULAR BEAM EPITAXY; SEMICONDUCTOR DOPING; SURFACE PROPERTIES; TENSILE STRENGTH; WEAR OF MATERIALS;

INDIUM PHOSPHIDE WAFERS; WARPAGE;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0030645410     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)