Highly sensitive and small flow-type chemical analysis system with integrated absorptiometric micro-flowcell

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 102-107

  Miyake, Ryo ^a   Tsuzuki, Kouichi ^a   Takagi, Takeo ^a   Imai, Kazumichi ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTIC EQUIPMENT; CHEMICAL REACTORS; CORRELATION METHODS; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; STANDARDS;

ABSORPTIOMETRIC MICROFLOWCELL; FLOW TYPE CHEMICAL ANALYSIS SYSTEM;

MICROANALYSIS;

EID: 0030644919     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)