Growth and characterization of AlN on 6H-SiC substrates

Materials Research Society Symposium - Proceedings

Volumn 449, Issue , 1997, Pages 245-250

  Lekova, M ^a   Auner, G W ^a   Jin, F ^a   Naik, R ^a   Naik, V ^a  

^a WAYNE STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; EPITAXIAL GROWTH; MICROSCOPIC EXAMINATION; MOLECULAR BEAM EPITAXY; PLASMA APPLICATIONS; SEMICONDUCTING ALUMINUM COMPOUNDS;

ALUMINUM NITRIDE; PLASMA SOURCE MOLECULAR BEAM EPITAXY;

SEMICONDUCTING FILMS;

EID: 0030644721     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)