Electrical characterization of al-AlN(PSMBE grown)-Si MIS structures

Materials Research Society Symposium - Proceedings

Volumn 449, Issue , 1997, Pages 603-608

  Krupitskaya, R Y ^a   Auner, G W ^a   Daley, T E ^a  

^a WAYNE STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC INSULATORS; LEAKAGE CURRENTS; MIS DEVICES; MOLECULAR BEAM EPITAXY; PLASMA SOURCES; SILICON; THIN FILMS;

MIS STRUCTURES; NITRIDE SEMICONDUCTORS; PLASMA SOURCE MOLECULAR BEAM EPITAXY; SILICON SUBSTRATES;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 0030644701     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)