Comparison of (L)M(thd)2 ( = Mg, Ca, Sr, Ba; L = tetraglyme, PMDETA) precursors for high K dielectric MOCVD

Materials Research Society Symposium - Proceedings

Volumn 446, Issue , 1997, Pages 327-332

  Bhandari, G ^a   Glassman, T E ^a   Studebaker, D B ^a   Stauf, G ^a   Baum, T H ^a  

^a Advanced Technology Materials Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; DIFFERENTIAL SCANNING CALORIMETRY; ELECTRIC VARIABLES MEASUREMENT; FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MOLECULAR STRUCTURE; OLIGOMERS; SOLUBILITY; THERMODYNAMIC STABILITY; THERMOGRAVIMETRIC ANALYSIS; TRANSPORT PROPERTIES; VAPORIZATION;

DIKETONATES; LEWIS BASE; LIQUID DELIVERY SYSTEM;

ORGANOMETALLICS;

EID: 0030644433     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)