3D microstructured cantilevers for optical detection applications

Proceedings of the International Semiconductor Conference, CAS

Volumn 2, Issue , 1997, Pages 537-540

  Muller, Raluca ^a   Pavelescu, Ioan ^a   Moagar Poladian, Victor ^a   Manea, Elena ^a   Nedelcu, Oana Tatiana ^a   Avramescu, Viorel ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SOFTWARE; ETCHING; FINITE ELEMENT METHOD; INTEGRATED OPTOELECTRONICS; MATHEMATICAL MODELS; MULTILAYERS; OPTICAL WAVEGUIDES; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SILICON NITRIDE; STRESS ANALYSIS;

SILICON ANISOTROPIC ETCHING;

PHOTODETECTORS;

EID: 0030638173     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)